COMPOSITION FOR PROVISIONAL FIXATION, PROVISIONAL FIXATION MATERIAL, TREATMENT METHOD OF SUBSTRATE AND SEMICONDUCTOR ELEMENT

PROBLEM TO BE SOLVED: To provide a composition for provisional fixation, capable of forming provisional fixation materials having retention retaining substrates in a process where the high temperature load is applied, and having easily peelable property in a process where the substrates are peeled f...

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Main Authors MIYAMATSU TAKASHI, MORI TAKASHI, TAKAMATSU NOBUHIRO, TAKAHASHI SEIICHIRO, HIRO AKIHITO, KAWAGUCHI KAZUO, TAKAMURA HAZUKI, GOTO HIROFUMI, OKUDA RYUICHI
Format Patent
LanguageEnglish
Published 10.11.2011
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Summary:PROBLEM TO BE SOLVED: To provide a composition for provisional fixation, capable of forming provisional fixation materials having retention retaining substrates in a process where the high temperature load is applied, and having easily peelable property in a process where the substrates are peeled from supports.SOLUTION: There is provided a composition for provisional fixation, comprising (A) a polyethersulfone, (B) a viscosity-imparting agent such as a phenoxy resin, a polymer having a phenolic hydroxy group, a polymer having a pyrrolidone group and a polyalkylene glycol, and (C) a solvent.
Bibliography:Application Number: JP20110006127