SMOOTH SURFACE INSPECTION APPARATUS

• Main Authors: SHIMIZU HIROKI, JO KINKOKU, NAKAO TOSHIYUKI, NAKADA TOSHIHIKO, NAKAMURA SHIGEO, HONDA TOSHIFUMI
• Format: Patent
• Language: English
• Published: 20.10.2011
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

PROBLEM TO BE SOLVED: To provide a smooth surface inspection apparatus for avoiding a damage in an object to be measured and a slider, and detecting a minute defect.SOLUTION: The smooth surface inspection apparatus includes a first part comprising a stage 26 for supporting the object to be measured 3, a spindle 4 for rotating the stage 26, a light source 5 for irradiating the object to be measured 3 with light, a light detector 8 for converting the scattered light from the object to be measured 3 into a signal, a signal processor 11 for converting the scattered light 7 into first defect information, and a first memory 12 for storing the first defect information, and a second part comprising the slider 9 for mounting a contact sensor for detecting a second defect smaller than the first defect, a load/unload mechanism for floating the slider 9, a slider controller 14 for controlling the load/unload mechanism 22 based on the first defect information stored in the first memory 12, and a second memory 17 for storing the second defect information converted by a contact sensor signal processor 16.