LIQUID TREATMENT APPARATUS, LIQUID TREATMENT METHOD, PROGRAM, AND PROGRAM RECORDING MEDIUM

• Main Authors: MATSUMOTO KAZUHISA, EJIMA KAZUYOSHI
• Format: Patent
• Language: English
• Published: 08.09.2011
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; CLEANING; CLEANING IN GENERAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; PREVENTION OF FOULING IN GENERAL; SEMICONDUCTOR DEVICES; THEIR RELEVANT APPARATUS; TRANSPORTING

PROBLEM TO BE SOLVED: To achieve wide-range adjustment without a large cost, concerning the concentration of a mixed liquid in a liquid treatment apparatus using the mixed liquid obtained by mixing a plurality of liquids. SOLUTION: The liquid treatment apparatus 10 includes: main piping 20; a liquid supply mechanism 40 connected to the main piping; a plurality of branch pipes 25 branching off from the main piping; and a plurality of treatment units 50 connected to the respective branch pipes. The liquid supply mechanism 40 includes a mixer 43 provided on the main piping; a first liquid supply pipe 41b for supplying a first liquid from a first liquid source to the mixer; a second liquid supply pipe 42b for supplying a second liquid from a second liquid tank to the mixer according to a pressure controlled by a regulator 42t. The second liquid supply pipe 42b is provided with a flow regulating valve 42d. The flow regulating valve 42d and the regulator 42t are interlockingly controlled for the mixing ratio adjustment of the mixed liquid. COPYRIGHT: (C)2011,JPO&INPIT