CHARGED PARTICLE BEAM DEVICE

PROBLEM TO BE SOLVED: To provide a charged particle beam device in which shifting of an irradiation part by the charged particle beams, caused by external sound, is reduced. SOLUTION: The charged particle beam device is provided with a cover which envelops a charged particle source and a sample stag...

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Bibliographic Details
Main Authors MATSUSHIMA MASARU, MARUYAMA NAOTOMO, KAMIDE HIDESUKE, NAKAGAWA SHUICHI
Format Patent
LanguageEnglish
Published 25.08.2011
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:PROBLEM TO BE SOLVED: To provide a charged particle beam device in which shifting of an irradiation part by the charged particle beams, caused by external sound, is reduced. SOLUTION: The charged particle beam device is provided with a cover which envelops a charged particle source and a sample stage, and a mechanism which changes a position or an arrangement angle of at least a part of the cover inner face. COPYRIGHT: (C)2011,JPO&INPIT
Bibliography:Application Number: JP20100026776