SHAPE MEASURING METHOD, SHAPE MEASURING DEVICE, AND MACHINE TOOL

PROBLEM TO BE SOLVED: To provide a shape measuring method and a shape measuring device capable of measuring a shape highly accurately by removing suitably an influence of vibration of a measuring part. SOLUTION: In this method for condensing by an imaging lens, scattered light of a light spot hit on...

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Bibliographic Details
Main Authors FUKUDA YOHEI, MAEDA YUKIO, YAZAWA TAKAAKI, TAMURA TAKASHI
Format Patent
LanguageEnglish
Published 18.08.2011
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Summary:PROBLEM TO BE SOLVED: To provide a shape measuring method and a shape measuring device capable of measuring a shape highly accurately by removing suitably an influence of vibration of a measuring part. SOLUTION: In this method for condensing by an imaging lens, scattered light of a light spot hit onto a measuring part surface 7, and measuring the shape of the measuring part surface 7 from a change of the condensing position, a light spot acquired by imaging the scattered light is received directly by a light position sensor 9 to measure the change of the condensing position, and the light spot acquired by imaging the scattered light is received by the light position sensor through a slit 11 to measure the change of the condensing position, and the shape of the measuring part surface 7 is determined from a difference between each measured variation of the condensing position. COPYRIGHT: (C)2011,JPO&INPIT
Bibliography:Application Number: JP20100021274