METHOD OF MANUFACTURING ELECTRO-OPTICAL DEVICE

• Main Authors: ONO TATSUKI, KATO YOSHIKATSU
• Format: Patent
• Language: English
• Published: 11.08.2011
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

PROBLEM TO BE SOLVED: To remove metal impurities remaining on the surface of a substrate appropriately. SOLUTION: A cleaning process in a method of manufacturing an electro-optical device includes an ozone water treatment step for supplying ozone water to the surface of a substrate, a first rinse tr...