PHOTONIC DEVICE AND METHOD OF MANUFACTURING THE SAME
PROBLEM TO BE SOLVED: To provide particularly a photonic device, along with a method of manufacturing the photonic device, concerning a semiconductor diode made of a compound semiconductor on a silicon wafer or made of another lattice mismatched conductor, and a method of forming the semiconductor d...
Saved in:
Main Author | |
---|---|
Format | Patent |
Language | English |
Published |
21.07.2011
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | PROBLEM TO BE SOLVED: To provide particularly a photonic device, along with a method of manufacturing the photonic device, concerning a semiconductor diode made of a compound semiconductor on a silicon wafer or made of another lattice mismatched conductor, and a method of forming the semiconductor diode. SOLUTION: The photonic device includes a substrate; a dielectric material including two or more openings that expose part of the substrate, the openings each having an aspect ratio of at least 1; a lower diode material including a compound semiconductor material that is lattice mismatched to the substrate, occupies two or more openings and is coalesced above the two or more openings to form a lower diode region; an upper diode material; and an active diode region provided between the upper and lower diode materials. COPYRIGHT: (C)2011,JPO&INPIT |
---|---|
Bibliography: | Application Number: JP20100156436 |