ILLUMINATION OPTICAL SYSTEM, ALIGNER USING THE SAME, AND DEVICE MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide an illumination optical system which ensures high illumination efficiency while using a discharge tube of a normal ultra-high-voltage mercury vapor lamp or a laser light source, without using a special light source. SOLUTION: This invention relates to the illuminatio...

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Bibliographic Details
Main Authors TERASHI TAKAAKI, OSAKA NOBORU
Format Patent
LanguageEnglish
Published 21.07.2011
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide an illumination optical system which ensures high illumination efficiency while using a discharge tube of a normal ultra-high-voltage mercury vapor lamp or a laser light source, without using a special light source. SOLUTION: This invention relates to the illumination optical system 10 in which an object to be irradiated is irradiated with light introduced from a light source 18. The illumination optical system 10 includes a circulation optical system 17 which acquires part of light incident on a plane 14 conjugate to the object to be irradiated and guides again the acquired light to the plane 14 conjugate to the object to be irradiated. COPYRIGHT: (C)2011,JPO&INPIT
Bibliography:Application Number: JP20100000916