METHOD AND APPARATUS FOR PREVENTING BLOCKAGE OF EXHAUST PIPE OF REACTOR FOR POLYCRYSTALLINE SILICON PRODUCTION

• Main Authors: SAITO KINJIRO, KOBORI HISAHIRO, MIZOGUCHI TAKASHI, MUNAKATA HIROSHI
• Format: Patent
• Language: English
• Published: 07.07.2011
• Subjects: CHEMISTRY; COMPOUNDS THEREOF; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS

PROBLEM TO BE SOLVED: To prevent the blockage of an exhaust pipe of a reactor due to the deposition of silicon in the exhaust pipe during the production of polycrystalline silicon by a zinc reductive method. SOLUTION: A method used for producing polycrystalline silicon includes supplying silicon tetrachloride vapor and zinc vapor into the reactor, exhausting an exhaust gas from the reactor, and reacting silicon tetrachloride vapor with zinc vapor in the reactor in order to deposit the polycrystalline silicon formed in the reactor. In the method, a method for preventing the blockage of an exhaust pipe of the reactor for producing the polycrystalline silicon is characterized that: when the pressure in the reactor rises by 1-15 kPa in comparison with the pressure at the time of beginning the production of the polycrystalline silicon, a precipitate removal operation for scraping out a deposit deposited in an exhaust pipe of the reactor to the outside of the exhaust pipe is performed by using a precipitate removal member. COPYRIGHT: (C)2011,JPO&INPIT