AUTO-SEQUENCING MULTI-DIRECTIONAL INLINE PROCESSING APPARATUS

PROBLEM TO BE SOLVED: To provide flexibility of a main frame architecture while obtaining advantages of throughput of a linear system with continuous increase of demand for a solar cell manufacturing system. SOLUTION: An apparatus and method for concurrent processing of several substrates are provid...

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Bibliographic Details
Main Authors KLEINKE STEVE, BLONIGAN WENDELL THOMAS, LAW KAM S, STEVENS CRAIG LYLE, TOSHIMA MASAO, BERKSTRESSER DAVID ERIC
Format Patent
LanguageEnglish
Published 23.06.2011
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide flexibility of a main frame architecture while obtaining advantages of throughput of a linear system with continuous increase of demand for a solar cell manufacturing system. SOLUTION: An apparatus and method for concurrent processing of several substrates are provided. The system employs a novel architecture which, while being linear, may autonomously sequence processing and move substrates in different directions as necessary. The system moves several substrates concurrently, however, unlike the prior art it does not utilize trays. COPYRIGHT: (C)2011,JPO&INPIT
Bibliography:Application Number: JP20100275100