METHOD OF MANUFACTURING SOLAR CELL ELEMENT

• Main Author: KOMURO YUJI
• Format: Patent
• Language: English
• Published: 16.06.2011
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell element with high efficiency in a short time. SOLUTION: The method of manufacturing a solar cell element includes a semiconductor-substrate preparing step of preparing a one conductivity type semiconductor substrate of a p-type or n-type, a semiconductor-layer forming step of forming a semiconductor layer of an opposite conductivity type to that of the one conductivity type semiconductor substrate on a surface of the one conductivity type semiconductor substrate including a side surface thereof to form pn junction, and a groove forming step of removing parts of the opposite conductivity type semiconductor layer and the one conductivity type semiconductor substrate by irradiating a laser beam on the side surface of the one conductivity type semiconductor substrate where the opposite conductivity type semiconductor layer is formed, thereby forming a groove exposing the pn junction on an inner wall surface. COPYRIGHT: (C)2011,JPO&INPIT