FOREIGN SUBSTANCE DETECTION METHOD AND FOREIGN SUBSTANCE DETECTION DEVICE

• Main Authors: OKABE ATSUSHI, KOBAYASHI TERUKAZU
• Format: Patent
• Language: English
• Published: 16.06.2011
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a foreign substance detection method and a foreign substance detection device which can shorten an analytical inspection time while maintaining a high inspection accuracy. SOLUTION: The foreign substance detection method for detecting foreign substances in an inspection sample based on a sample mass spectrum obtained from the inspection sample and a standard mass spectrum includes: sorting out the sample mass spectrum and the standard mass spectrum by aligning sorting positions and charge ratio sorting widths in a mass-to-charge ratio axis direction over an entire spectrum range from a beginning to an end of a mass-to-charge ratio axis; and comparing a sorted sample mass-to-charge ratio sorting width spectrum and a standard mass-to-charge ratio sorting width spectrum at each corresponding sorting position. COPYRIGHT: (C)2011,JPO&INPIT