PRESSURE SENSOR AND METHOD FOR MANUFACTURING THE SAME

• Main Author: MIYAMOTO TAISUKE
• Format: Patent
• Language: English
• Published: 16.06.2011
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a technique which enables accurate detection of the pressure of gas, having the possibility of permeating through a metal member which has a deep hole, in a pressure sensor which includes the metal member. SOLUTION: The pressure sensor is used for detecting the press...