PRESSURE SENSOR AND METHOD FOR MANUFACTURING THE SAME

• Main Author: MIYAMOTO TAISUKE
• Format: Patent
• Language: English
• Published: 16.06.2011
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a technique which enables accurate detection of the pressure of gas, having the possibility of permeating through a metal member which has a deep hole, in a pressure sensor which includes the metal member. SOLUTION: The pressure sensor is used for detecting the pressure of gas. The pressure sensor includes the metal member having a hole which opens in one end and has a bottom in the other and into which the gas is introduced; a pressure detector which is provided at a position located outside the metal member and facing the bottom of the hole; a permeation suppressing layer made of a metal which is disposed at the bottom of the hole and suppresses permeation of the gas; and a resin layer which fixes the permeation suppressing layer to the bottom of the hole. COPYRIGHT: (C)2011,JPO&INPIT