DOUBLE-SIDE POLISHING DEVICE

PROBLEM TO BE SOLVED: To form a positioning means of a pressing means and a carrier in a simple structure, by arranging the pressing means on an upper surface plate in response to the carrier. SOLUTION: This double-side polishing device includes the upper surface plate 4, a lower surface plate 2, a...

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Bibliographic Details
Main Author IIHAMA TAKAO
Format Patent
LanguageEnglish
Published 16.06.2011
Subjects
DRESSING OR CONDITIONING OF ABRADING SURFACES
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To form a positioning means of a pressing means and a carrier in a simple structure, by arranging the pressing means on an upper surface plate in response to the carrier. SOLUTION: This double-side polishing device includes the upper surface plate 4, a lower surface plate 2, a sun gear 9 and an internal gear 10, the carrier 6 interposed between the sun gear 9 and the internal gear 10 and having a holding hole 7 of a rotating and revolving work 5, the pressing means 15 arranged on the upper surface plate 4 and arranged in response to the work 5, driving motors 11, 12, 13 and 14, and a control means 35. The driving motors 11 and 12 can stop the lower surface plate 2 and the upper surface plate 4 so that the pressing means 15 is opposed to the work 5 by controlling the control means 35 by the feeding back rotation of the respective motors 11, 12, 13 and 14, by connecting rotary encoders 20, 26, 27 and 28 to the motors 11, 12, 13 and 14 provided with a vector inverter control unit, by installing the rotary encoders 20, 26, 27 and 28 on a rotary shaft projected outside the motors 11, 12, 13 and 14. COPYRIGHT: (C)2011,JPO&INPIT
Bibliography:Application Number: JP20090273870