SEMICONDUCTOR WAFER CARRYING DEVICE AND CARRYING METHOD USING THE SAME

• Main Authors: SHIBAYAMA KEI, OKI YOSUKE, ONO KOJI, KOBAYASHI TOMOKAZU, MATSUMURA YASUHIDE
• Format: Patent
• Language: English
• Published: 02.06.2011
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To shorten a stop time in self-diagnosis and automatic correction of a semiconductor wafer carrying device, to simplify maintenance, and to lower the cost of the semiconductor wafer carrying device. SOLUTION: The semiconductor wafer carrying device includes a load port portion where a wafer storage container can be installed, a carrying robot portion which has a hand for gripping a wafer and carries the wafer, and an aligner which determines the direction of the wafer. At least one of the load port portion and aligner has a sensor provided to the load port portion or aligner, and the semiconductor wafer carrying device has a controller which measures the position of the hand with respect to at least one of the load port portion and aligner using the sensor, and corrects the position of the hand on the basis of the measured value thereof. COPYRIGHT: (C)2011,JPO&INPIT