COAXIAL CABLE DEVICE, AND PLASMA GENERATOR AND WORKPIECE PROCESSING DEVICE USING THE SAME

• Main Authors: YOSHIDA KAZUHIRO, MATSUUCHI HIDETAKA, TOTSUKA TAKAYA, MANKAWA HIROSHI
• Format: Patent
• Language: English
• Published: 12.05.2011
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE; WAVEGUIDES

PROBLEM TO BE SOLVED: To downsize a structure in a plasma generator used for workpiece processing such as a substrate reformation or the like. SOLUTION: There is provided a plasma generator in which a waveguide for propagating microwaves from a magnetron 4 is separated into a first waveguide 41 and a second waveguide connects both the waveguides with a coaxial cable device 42 and thereby improves a degree of freedom of setting the workpiece or the like. In the plasma generator, the coaxial cable device 42 includes a hollow coaxial cable body 421 and plugs 422, 423 with a through-hole through which both ends air passes. Accordingly, a pipe line is cut down which supplies scavenging air and a plasma raw material gas from the first waveguide 41 to the second waveguide and a plasma generating nozzle, thus permitting the structure to be downsized. Besides, the heat dissipation can be performed for the heat generation of the coaxial cable body 421, caused by high-power microwaves. COPYRIGHT: (C)2011,JPO&INPIT