CLOSING UNIT, VACUUM VALVE, AND VALVE PLATE
PROBLEM TO BE SOLVED: To provide a closing unit and the like in which each valve plate can be assembled and disassembled easily and in which each valve plate is fixed with stability in the mounted state and is positioned with sufficient accuracy. SOLUTION: Two valve plates (7) (8) are detachably fix...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
12.05.2011
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a closing unit and the like in which each valve plate can be assembled and disassembled easily and in which each valve plate is fixed with stability in the mounted state and is positioned with sufficient accuracy. SOLUTION: Two valve plates (7) (8) are detachably fixed to a carrier plate (19) that lies between the two valve plates (7, 8). A plurality of clamping surfaces (22)-(26) contacting each other are mutually clamped by clamping pieces (20) (21) for fixing the valve plates (7) (8) to the carrier plate (19). At least one of the clamping surfaces (22)-(26) is constructed as an angular surface, by which the valve plate (7) (8) are pressed against the carrier plate (19). COPYRIGHT: (C)2011,JPO&INPIT |
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Bibliography: | Application Number: JP20100238898 |