CHARGED PARTICLE BEAM APPARATUS, AND DISPLAY METHOD OF THREE DIMENSIONAL INFORMATION IN CHARGED PARTICLE BEAM APPARATUS

PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus capable of capturing in three dimensions changes of a sample due to gas atmosphere, light irradiation and heating or the like without exposing to the atmosphere. SOLUTION: The apparatus includes a sample table rotatable with a rotati...

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Bibliographic Details
Main Authors WATABE AKIRA, YAGUCHI NORIE, AZUMA JUNZO, NAGAKUBO KOHEI
Format Patent
LanguageEnglish
Published 06.05.2011
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus capable of capturing in three dimensions changes of a sample due to gas atmosphere, light irradiation and heating or the like without exposing to the atmosphere. SOLUTION: The apparatus includes a sample table rotatable with a rotating axis perpendicular to an irradiation direction of electron beams as a center, and a sample holder which can form an airtight chamber around the sample table. The sample can be chemically-reacted in an arbitrary atmosphere to enable to perform a three-dimensional analysis on this reaction. Further, the three-dimensional analysis can be performed on a sample likely to be changed in the atmosphere without exposing the sample to the atmosphere. COPYRIGHT: (C)2011,JPO&INPIT
Bibliography:Application Number: JP20090245029