FILM LIKE ADHESIVE
PROBLEM TO BE SOLVED: To provide a film like adhesive used in a back grind process, dicing process and flip chip-bonding process of a semiconductor wafer and excellent in the peeling property of a back grind tape and wafer protecting property. SOLUTION: This film like adhesive is provided by laminat...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
14.04.2011
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a film like adhesive used in a back grind process, dicing process and flip chip-bonding process of a semiconductor wafer and excellent in the peeling property of a back grind tape and wafer protecting property. SOLUTION: This film like adhesive is provided by laminating an adhesive layer, a thermosetting resin layer and a second plastic layer on a first plastic layer in this order, and having ≤50 N/m peeling force at 90° peeling test between the adhesive layer and thermosetting resin layer at any of 300 mm/min and 500 mm/min peeling speeds. COPYRIGHT: (C)2011,JPO&INPIT |
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Bibliography: | Application Number: JP20090227771 |