METHOD OF MEASURING CONSTITUENT IN THIN-FILM MATERIAL COMPOSITION

PROBLEM TO BE SOLVED: To provide a method of measuring one portion or entire portion of effective constituents of a thin-film material composition that is a composition of not less than two constituents used for forming a thin film of a metal-containing material and contains at least one type of met...

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Bibliographic Details
Main Authors NISHIDA AKIHIRO, SHIRATORI TSUBASA, SHIMADA SADASUKE, SUZUKI SHINICHI
Format Patent
LanguageEnglish
Published 10.03.2011
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Summary:PROBLEM TO BE SOLVED: To provide a method of measuring one portion or entire portion of effective constituents of a thin-film material composition that is a composition of not less than two constituents used for forming a thin film of a metal-containing material and contains at least one type of metal compound and other compounds as effective constituents. SOLUTION: In the method of measuring constituents, spectrum absorption by a near infrared spectroscopy is used as a method of measuring active constituents suitable for measuring constituents in a manufacturing process of a thin film for a thin-film material composition. COPYRIGHT: (C)2011,JPO&INPIT
Bibliography:Application Number: JP20090194536