PIEZOELECTRIC VIBRATOR, MANUFACTURING METHOD OF PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO WAVE CLOCK
PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator which can secure a degree of vacuum in a cavity and can be manufactured with high efficiency. SOLUTION: The piezoelectric vibrator 1 includes a base board 2 and a lid board 3 which are superimposed on each other so as to form a cavity C there...
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Main Author | |
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Format | Patent |
Language | English |
Published |
10.02.2011
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator which can secure a degree of vacuum in a cavity and can be manufactured with high efficiency. SOLUTION: The piezoelectric vibrator 1 includes a base board 2 and a lid board 3 which are superimposed on each other so as to form a cavity C therebetween, a piezoelectric vibrating reed 4 which is accommodated in the cavity and bonded to the base board, a gettering material 34 which is formed in the base board to be accommodated in the cavity, a bonding film 35 which is formed on the entire surface of the lid board facing the base board so as to bond both boards to each other at a portion thereof in contact with the base board, wherein the bonding film is formed of a material which is capable of absorbing a surrounding gas by being activated with laser irradiation. COPYRIGHT: (C)2011,JPO&INPIT |
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Bibliography: | Application Number: JP20090173382 |