ZINC OXIDE BASED SINTERED COMPACT TABLET, AND METHOD FOR PRODUCING THE SAME

• Main Authors: MAENO YASUYUKI, SOGABE KENTARO
• Format: Patent
• Language: English
• Published: 03.02.2011
• Subjects: ARTIFICIAL STONE; CEMENTS; CERAMICS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LIME, MAGNESIA; METALLURGY; REFRACTORIES; SLAG; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TREATMENT OF NATURAL STONE

PROBLEM TO BE SOLVED: To provide a zinc oxide based sintered compact tablet which has no generation of a splash phenomenon or the like upon film deposition, can stably perform discharge, further has high mechanical strength, and is hard to break upon automatic conveying or the like. SOLUTION: A normal pressure sintered compact tablet is subjected to reduction treatment at 900 to 1,300°C in a vacuum under the pressure of ≤1×10-3Pa, so as to be a zinc oxide based sintered compact tablet having a compressive strength of ≥150 MPa while having a relative density of 50 to 70%, and in which specific resistance in the surface and at the inside is ≤1×102Ω cm, respectively. Particularly, in a zinc oxide based sintered compact tablet comprising gallium, the specific resistance is ≤1×10-2Ω cm, and a difference in the concentration of zinc oxide between the surface and the inside is ≤0.5 mass%. COPYRIGHT: (C)2011,JPO&INPIT