LAMINATED SUBSTRATE, AND MANUFACTURING METHOD FOR LIGHT-EMITTING ELEMENT

• Main Authors: OGURI SEIJI, TANIGUCHI YOSHIKO
• Format: Patent
• Language: English
• Published: 09.12.2010
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a manufacturing method for a light-emitting element capable of restraining reduction in light-emitting efficiency. SOLUTION: The manufacturing method for a light-emitting element is a manufacturing method for a laminated substrate wherein a first pattern layer made from a first material and a second pattern layer made from a second material are formed on a substrate. The manufacturing method for a light-emitting element has a first material layer formation process of forming a first material layer made of the first material on the substrate, a resist pattern formation process of forming a resist pattern on the first material layer, a first pattern layer formation process of etching the first material layer by using the resist pattern as a mask and forming the first pattern layer, a second pattern layer formation process of forming the second pattern layer at an etched section of the first material layer on the substrate by depositing a second material layer made of the second material on the substrate where the first pattern layer is formed by using the resist pattern as a mask, and a resist removal process of removing the resist pattern. COPYRIGHT: (C)2011,JPO&INPIT