CHARGED PARTICLE MEASURING INSTRUMENT AND MEASURING METHOD THEREOF

PROBLEM TO BE SOLVED: To provide a charged particle measuring instrument measuring an α ray in a short period of measurement time without causing an error attributable to background fluctuations. SOLUTION: The charged particle measuring instrument has: a sample measuring α ray detector for measuring...

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Bibliographic Details
Main Authors KITAGUCHI HIROSHI, UENO KATSUNOBU, SAKAKIBARA YOSHINOBU, TADOKORO TAKAHIRO, KAIHARA AKIHISA
Format Patent
LanguageEnglish
Published 09.12.2010
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Summary:PROBLEM TO BE SOLVED: To provide a charged particle measuring instrument measuring an α ray in a short period of measurement time without causing an error attributable to background fluctuations. SOLUTION: The charged particle measuring instrument has: a sample measuring α ray detector for measuring both the α ray to be emitted from a sample and a background; a background measuring α ray detector for measuring the background; an α ray shielding plate for preventing the α ray to be emitted from the sample from entering the background measuring α ray detector; and an α ray measuring instrument for inputting measurement values measured at the same time from the sample measuring α ray detector and the background measuring α ray detector so as to compute a net measurement value of the α ray. COPYRIGHT: (C)2011,JPO&INPIT
Bibliography:Application Number: JP20090130531