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Summary:PROBLEM TO BE SOLVED: To solve such the problem that when the initial displacement of a membrane greatly varies in respective cells in an element, there is a need to reduce a bias voltage to be applied between electrodes, which lowers sensitivity. SOLUTION: The electromechanical conversion element includes an element having a plurality of cells each including a first electrode and a second electrode provided with a cavity being disposed between the first electrode and the second electrode. A groove is formed in a position at a predetermined distance from the cavity of the cell provided on the outermost periphery of the element. COPYRIGHT: (C)2011,JPO&INPIT
Bibliography:Application Number: JP20090096145