ELECTROMECHANICAL CHANGE ELEMENT
PROBLEM TO BE SOLVED: To solve such the problem that when the initial displacement of a membrane greatly varies in respective cells in an element, there is a need to reduce a bias voltage to be applied between electrodes, which lowers sensitivity. SOLUTION: The electromechanical conversion element i...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
04.11.2010
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To solve such the problem that when the initial displacement of a membrane greatly varies in respective cells in an element, there is a need to reduce a bias voltage to be applied between electrodes, which lowers sensitivity. SOLUTION: The electromechanical conversion element includes an element having a plurality of cells each including a first electrode and a second electrode provided with a cavity being disposed between the first electrode and the second electrode. A groove is formed in a position at a predetermined distance from the cavity of the cell provided on the outermost periphery of the element. COPYRIGHT: (C)2011,JPO&INPIT |
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Bibliography: | Application Number: JP20090096145 |