FLUID CONTROL DEVICE

• Main Authors: NISHINO KOJI, MATSUDA TAKAHIRO, UCHIDA YOHEI, HIROSE JUN, TEZUKA KAZUYUKI, IKEDA SHINICHI, KOGAI MUTSUNORI, DOI RYOSUKE
• Format: Patent
• Language: English
• Published: 16.09.2010
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CONTROLLING; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

PROBLEM TO BE SOLVED: To provide a fluid control device for reducing a space as well as costs. SOLUTION: The fluid control device 1 includes a fluid control unit 2 and a fluid introduction unit 3. The fluid introduction unit 3 is divided into three and includes: a first and second inlet-side shutoff/opening units 5, 6 arranged on an inlet-side and each composed of 2×N/2 pieces of on-off valves 23; and a fluid control unit side shutoff/opening unit 7 composed of 4×M pieces of the on-off valves 23 and arranged between the first and the second inlet-side shutoff/opening units 5, 6 and the fluid control unit 2. COPYRIGHT: (C)2010,JPO&INPIT