DRAWING DEVICE, DATA PROCESSING DEVICE FOR DRAWING DEVICE, AND METHOD FOR GENERATING DRAWING DATA FOR DRAWING DEVICE

• Main Authors: YAMADA AKIRA, YASAKA SATOSHI
• Format: Patent
• Language: English
• Published: 16.09.2010
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; PRINTED CIRCUITS; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a direct drawing device capable of correcting a drawing data in accordance with deformation of a substrate through an easy process. SOLUTION: A drawing area including an object image for drawing represented by an initial drawing data in a raster format, which is converted from a pattern data in a vector format, is virtually divided into a plurality of mesh areas; and in each of the plurality of mesh areas, a division drawing data correlating the arrangement position in the drawing area and the drawing contents at the arrangement position is created. Upon drawing, an arrangement position to rearrange the plurality of mesh areas according to the shape of a substrate is specified based on the position of an alignment mark provided on the substrate, which is identified from a photographed image obtained by photographing the substrate as a drawing object; and drawing contents correlating to the plurality of mesh areas in the division drawing data are synthesized to create one drawing data while the plurality of mesh areas are rearranged at specified arrangement positions. COPYRIGHT: (C)2010,JPO&INPIT