TREATMENT APPARATUS

PROBLEM TO BE SOLVED: To prevent steam of a treatment liquid that rises from a workpiece picked up from treatment chamber, from infiltrating the other side of a partition attached on a transport driving section. SOLUTION: The treatment apparatus includes a partition 28, having a gap 25; a treatment...

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Bibliographic Details
Main Author EJIMA KAZUYOSHI
Format Patent
LanguageEnglish
Published 19.08.2010
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To prevent steam of a treatment liquid that rises from a workpiece picked up from treatment chamber, from infiltrating the other side of a partition attached on a transport driving section. SOLUTION: The treatment apparatus includes a partition 28, having a gap 25; a treatment chamber 31 provided on one side of the partition 28 and trapping a treatment liquid C1 for treating a workpiece Wg; and a transport mechanism having a support section 21 capable of passing through the gap 25 of the partition 28 and a transport driving section 23 provided on the other side of the partition 28 and moving the support section 21. A shielding section 12 for covering the gap 25 is provided on the gap 25 of the partition 28. The shielding section 12 has a plurality of extending shielding portions 13, having elasticity and extending in a vertical direction. COPYRIGHT: (C)2010,JPO&INPIT
Bibliography:Application Number: JP20090022728