METHOD FOR MANUFACTURING QUARTZ-CRYSTAL VIBRATOR

PROBLEM TO BE SOLVED: To provide a method which manufactures a quartz-crystal vibrator for obtaining a desired quartz-crystal piece from a quartz-crystal wafer by etching and freely disposes electrodes without adding a new process. SOLUTION: An etching mask 6 having a dummy regions 44, 48 extending...

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Bibliographic Details
Main Authors SASAKI HIROYUKI, TASHIRO AKIHIKO
Format Patent
LanguageEnglish
Published 12.08.2010
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Summary:PROBLEM TO BE SOLVED: To provide a method which manufactures a quartz-crystal vibrator for obtaining a desired quartz-crystal piece from a quartz-crystal wafer by etching and freely disposes electrodes without adding a new process. SOLUTION: An etching mask 6 having a dummy regions 44, 48 extending in a +X axis direction of a wafer W disposed in two positions corresponding to corners on the +X side of a quartz-crystal piece 10 when forming the quartz-crystal piece 10 are formed and etching of grooves 7 in the positions corresponding to the dummy regions 44, 48 in forming the quartz-crystal piece 10 is delayed. Thus, the quartz-crystal piece 10 having no chipped portion in the corners is formed in the wafer W in the state it is connected and supported to a connection support portion 11. COPYRIGHT: (C)2010,JPO&INPIT
Bibliography:Application Number: JP20090020263