METHOD FOR REGENERATING USED SLURRY

PROBLEM TO BE SOLVED: To recycle a used polishing slurry having cleaning water mixed therein and solve the problem of waste fluid disposal. SOLUTION: The method for regenerating the used slurry includes a step of selectively separating and removing a polishing slurry component consisting of abrasive...

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Bibliographic Details
Main Authors IIYAMA MASAMITSU, ABE TSUGI
Format Patent
LanguageEnglish
Published 05.08.2010
Subjects
BASIC ELECTRIC ELEMENTS
DRESSING OR CONDITIONING OF ABRADING SURFACES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To recycle a used polishing slurry having cleaning water mixed therein and solve the problem of waste fluid disposal. SOLUTION: The method for regenerating the used slurry includes a step of selectively separating and removing a polishing slurry component consisting of abrasives, a solvent, and an additive from a foreign substance component such as a liquid, a polishing object, a pad, and a dresser, which are mixed by the polishing operation and not intrinsically contained in the polishing slurry. COPYRIGHT: (C)2010,JPO&INPIT
Bibliography:Application Number: JP20090147163