METHOD AND DEVICE FOR PRODUCING POLYCRYSTALLINE SILICON

• Main Authors: ENDO TOSHIHIDE, TAKEGUCHI MASAKATSU
• Format: Patent
• Language: English
• Published: 08.07.2010
• Subjects: CHEMISTRY; COMPOUNDS THEREOF; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS

PROBLEM TO BE SOLVED: To stabilize the treatment for converting an exhaust gas into a raw material, to rise the productivity of a polycrystalline silicon and to improve and stabilize a quality by appropriately separating gas and liquid by cooling the exhaust gas without generating a liquid state mis...