PIEZOELECTRIC ELEMENT AND METHOD OF MANUFACTURING THE SAME, LIQUID INJECTION HEAD AND METHOD OF MANUFACTURING THE SAME, AND LIQUID INJECTION DEVICE

• Main Authors: SAWAZAKI TATSUO, TAKABE HONKI, TORIMOTO TATSURO, SUMI KOJI, KURIKI AKIRA
• Format: Patent
• Language: English
• Published: 17.06.2010
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; ELECTRICITY; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

PROBLEM TO BE SOLVED: To provide a piezoelectric element and a method of manufacturing the same, a liquid injection head and a method of manufacturing the same, and a liquid injection device, wherein the displacement decreasing rate associated with the number of driving operations is prevented while ensuring the displacement amount when driven as large as possible. SOLUTION: The method of manufacturing the piezoelectric element includes: the sintering step of sintering a piezoelectric precursor film having a composition indicating a relation Zr/Ti+Zr>Ti/Ti+Zr to form a piezoelectric film; and the cooling step (the gas supplying step) of spraying a nitrogen-gas-containing gas to the piezoelectric film sintered at the sintering step. At the cooling step, supply of N2 gas is adjusted such that a relation Pm/2Pr between saturation polarization Pm and remanent polarization Pr is at least 1.95 and an anti-electric field Vc(-) on the negative side is at least -1.75 V in the polarization-electric field hysteresis characteristics of the piezoelectric element film. COPYRIGHT: (C)2010,JPO&INPIT