DELTA TCC (TRANSMISSION CROSS COEFFICIENT) FOR HIGH-SPEED SENSIBILITY MODEL CALCULATION

• Main Authors: SHAO WENJIN, YE JUN, CAO YU, CAO HUA
• Format: Patent
• Language: English
• Published: 27.05.2010
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a method to decide a difference between a reference image of a pattern and additional image. SOLUTION: The method includes to decide a reference imaging function, to decide a parameter of a difference function expressing a difference between the reference imaging fun...