DELTA TCC (TRANSMISSION CROSS COEFFICIENT) FOR HIGH-SPEED SENSIBILITY MODEL CALCULATION

PROBLEM TO BE SOLVED: To provide a method to decide a difference between a reference image of a pattern and additional image. SOLUTION: The method includes to decide a reference imaging function, to decide a parameter of a difference function expressing a difference between the reference imaging fun...

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Bibliographic Details
Main Authors SHAO WENJIN, YE JUN, CAO YU, CAO HUA
Format Patent
LanguageEnglish
Published 27.05.2010
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a method to decide a difference between a reference image of a pattern and additional image. SOLUTION: The method includes to decide a reference imaging function, to decide a parameter of a difference function expressing a difference between the reference imaging function and an additional imaging function, and to calculate the difference between the reference image of the pattern and the additional image on the basis of the difference function and decided parameter. COPYRIGHT: (C)2010,JPO&INPIT
Bibliography:Application Number: JP20090248812