INCLINED ANGLE MEASUREMENT METHOD AND OPTICAL MEASUREMENT APPARATUS

• Main Authors: URA HARUO, TANIGUCHI TOMONOBU, NAGAE TSUTOMU, OBAYASHI NAOKI
• Format: Patent
• Language: English
• Published: 27.05.2010
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To accurately measure an inclined angle of a hole provided in a to-be-measured object. SOLUTION: An original image data of an area including the hole 132 in the to-be-measured object 130 is obtained. A first image data of the area is obtained in a state that the area including the hole 132 in the to-be-measured object 130 is irradiated with a first measurement light having a planar cross section. A second image data of the area is obtained in a state that the area including the hole 132 is irradiated with a second measurement light having a plurality of linear cross sections. A third image data regarding the first measurement light in the area including the hole 132 is obtained by calculating a difference between the first image data and the original image data. A fourth image data regarding the second measurement light in the area including the hole 132 is obtained by calculating a difference between the second image data and the original image data. Position data of a plurality of intersections between the periphery of the hole 132 in the third image data and the second measurement light in the fourth image data are calculated. The inclined angle of the hole 132 is calculated by using the position data. COPYRIGHT: (C)2010,JPO&INPIT