METHOD OF CONSTRUCTING FLOW PATH INTO DIAMOND SUBSTRATE

• Main Authors: YAMADA HIDEAKI, CHAYAHARA AKIYOSHI, MOKUNO YOSHIAKI
• Format: Patent
• Language: English
• Published: 30.04.2010
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; CHEMISTRY; CRYSTAL GROWTH; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; METALLURGY; PHYSICS; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; TESTING; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

PROBLEM TO BE SOLVED: To provide a method of constructing an embedded fine flow path (micro channel) in a substrate of diamond precisely with a relatively simple procedure. SOLUTION: The method of constructing an embedded flow path in the diamond substrate includes the following steps of (1)-(4): (1) a step of making a surface part in an exposed state corresponding to the part where the flow path is to be formed and forming a barrier layer on the surface of the diamond surface other than the exposed part; (2) a step of injecting ions from the surface of the diamond substrate where the barrier layer is formed in the step (1); (3) a step of heating the diamond substrate where ions have been injected and forming a graphitized non diamond layer in the diamond substrate; and (4) a step of removing the graphitized non diamond layer by etching to form the flow path. COPYRIGHT: (C)2010,JPO&INPIT