METHOD AND SYSTEM FOR CONTROLLING PROCESS BY USING MATERIAL PROCESS-TOOL AND PERFORMANCE DATA

• Main Authors: YUE HONGYU, LAM HIEU A
• Format: Patent
• Language: English
• Published: 22.04.2010
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; COMPUTING; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

PROBLEM TO BE SOLVED: To provide a method and system for controlling a process by using a material process-tool and a performance data. SOLUTION: A system for processing a material (1) includes a process-tool (10) and a process-performance controlling system (100). The process-performance controlling system (100) includes a process-performance controller (55) coupled to the process-tool (10). The process-performance controller (55) includes a process-performance predicting model (110), a process-method correcting filter (120), a process controller (130), and a process-performance model correcting algorithm (150). The process-performance predicting model (110) is constituted so as to receive tool-data from a plurality of sensors coupled to the process-tool (10) and predict a process-performance data. COPYRIGHT: (C)2010,JPO&INPIT