ACCELERATION SENSOR

• Main Authors: KAZAMA ATSUSHI, OKADA RYOJI, SAITO MASAKATSU, HAMAGUCHI YASUHIRO
• Format: Patent
• Language: English
• Published: 15.04.2010
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; MEASURING; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of reducing a change in offset of its output before and after its mounting onto a board of a product. SOLUTION: The acceleration sensor includes: an acceleration sensor element having a plurality of flexible beams supporting a weight, a supporting frame which surrounds the periphery of the weight and is connected to the respective beams, and a plurality of piezoresistive elements provided on the beams; and a protective package section containing this acceleration sensor element. In the acceleration sensor, frame-side connections wider in width than the beams are provided, and the supporting frame is connected to the beams through the frame-side connections. The change in offset output can be suppressed by reducing the differences between changes in transverse stress of piezoresistive elements near to the weight and piezoresistive elements near to the beams, with respect to external forces which the acceleration sensor element receives by thermal deformation of the resin-made protective package and the board of the product mounted with the package. COPYRIGHT: (C)2010,JPO&INPIT