PATTERN FORMING METHOD

• Main Authors: NIIDATE TAKESHI, SAKURADA KAZUAKI, UEHARA NOBORU
• Format: Patent
• Language: English
• Published: 08.04.2010
• Subjects: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; PERFORMING OPERATIONS; PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; SPRAYING OR ATOMISING IN GENERAL; TRANSPORTING

PROBLEM TO BE SOLVED: To establish a pattern forming technology using a reel-to-reel method and a liquid droplet discharge method, and to reduce cost of electronic equipment by mass production. SOLUTION: A system forms patterns on a belt-like substrate by the reel-to-reel method, including a liquid droplet discharge device 20 disposing a liquid material on the belt-like substrate 11 by the liquid droplet discharge method, and an atmospheric pressure control device 22 controlling the atmospheric pressure in a treatment space of the liquid droplet discharge device 20 higher than an adjacent space. The adjacent space may be constituted to include a space where heat treatment or optical treatment is performed to a membrane of the liquid material. COPYRIGHT: (C)2010,JPO&INPIT