ACTUATOR USING PIEZOELECTRIC ELEMENT AND METHOD OF DRIVING THE SAME

PROBLEM TO BE SOLVED: To provide an actuator using a piezoelectric element and a method of driving the actuator. SOLUTION: The actuator includes at least one piezoelectric cell which is displaced by an input voltage, and at least one piezoelectric sensor for sensing the displacement of the piezoelec...

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Bibliographic Details
Main Authors SO HYOUNG-JONG, LEE KYOUNG-WOO, KWON JAE-HWAN, TEI EIMIN, KIM HONG-HEE
Format Patent
LanguageEnglish
Published 25.03.2010
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Summary:PROBLEM TO BE SOLVED: To provide an actuator using a piezoelectric element and a method of driving the actuator. SOLUTION: The actuator includes at least one piezoelectric cell which is displaced by an input voltage, and at least one piezoelectric sensor for sensing the displacement of the piezoelectric cell, and embodies micromirror driving and sensing. COPYRIGHT: (C)2010,JPO&INPIT
Bibliography:Application Number: JP20090209158