EVACUATION UNIT AND POWER SAVING METHOD FOR SAVING ELECTRIC POWER CONSUMPTION OF EVACUATION UNIT

• Main Authors: CHIBA AKIO, SUZUKI SATOSHI, SASAKI TOMOAKI, SEKINO HIROYUKI
• Format: Patent
• Language: English
• Published: 11.03.2010
• Subjects: BLASTING; HEATING; LIGHTING; MECHANICAL ENGINEERING; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTMACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTPUMPS; WEAPONS

PROBLEM TO BE SOLVED: To provide an evacuation unit capable of saving electric power consumption in use and standby, and capable of quickly using a vacuum chamber when necessary. SOLUTION: The evacuation unit 10 is formed of a turbo-molecular pump 11 connected with a first exhaust pipe 16, a roughing vacuum pump 12 connected to the pump 11 via a second exhaust pipe 19, a first vacuum valve 13 capable of opening-closing the exhaust pipe 16, a second vacuum valve 14 capable of opening-closing the exhaust pipe 19, and a controller 15. In the unit 10, in its use and standby in a state of being connected to the vacuum chamber 17, while continuously operating the pump 11, a pump 12 is intermittently operated by repeating starting and stopping, and the valve 14 is put in a closed state in response to the stopping of the pump 12, and the valve 14 is put in an opening state in response to the starting of the pump 12. COPYRIGHT: (C)2010,JPO&INPIT