PLATE COOLING DEVICE AND HEAT TREATMENT SYSTEM

PROBLEM TO BE SOLVED: To provide a plate cooling device smoothly cooling plates subjected to heat treatment and a heat treatment system equipped with the plate cooling device. SOLUTION: The plate cooling device 10 includes a plate arrangement part 15 in which a substrate W as a cooling target is arr...

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Bibliographic Details
Main Author KANDA TOSHIRO
Format Patent
LanguageEnglish
Published 04.03.2010
Subjects
BASIC ELECTRIC ELEMENTS
BLASTING
CHEMISTRY
DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS,IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KINDOF FURNACE
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
FURNACES
GLASS
HEATING
KILNS
LIGHTING
MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
MECHANICAL ENGINEERING
METALLURGY
MINERAL OR SLAG WOOL
OVENS
RETORTS
WEAPONS
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Summary:PROBLEM TO BE SOLVED: To provide a plate cooling device smoothly cooling plates subjected to heat treatment and a heat treatment system equipped with the plate cooling device. SOLUTION: The plate cooling device 10 includes a plate arrangement part 15 in which a substrate W as a cooling target is arranged; a pair of blowout ports 30, 30 arranged to sandwich the substrate W disposed in the plate arrangement part 15 from lateral sides and having air blowout directions opposing to each other; air blowers 17 for blowing air to the blowout ports 30, 30; and a control part for controlling the air blowers 17. The substrate W arranged in the plate arrangement part 15 is cooled by the air blown out of the pair of blowout ports 30, 30. COPYRIGHT: (C)2010,JPO&INPIT
Bibliography:Application Number: JP20080213208