FLOATING-CARRYING DEVICE

PROBLEM TO BE SOLVED: To restrain damage to a substrate W by avoiding the interference of one portion of the substrate W, a floating unit 33 and the like as much as possible while simplifying the configuration of a floating-carrying device 1. SOLUTION: The floating-carrying device has: a plurality o...

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Bibliographic Details
Main Authors HIRATA KENSUKE, ONO TOSHITAKA
Format Patent
LanguageEnglish
Published 25.02.2010
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To restrain damage to a substrate W by avoiding the interference of one portion of the substrate W, a floating unit 33 and the like as much as possible while simplifying the configuration of a floating-carrying device 1. SOLUTION: The floating-carrying device has: a plurality of connection circuits 41 connected to one another so that one edge communicates with a corresponding chamber 25; common detection circuits 43 connected to one another so that other edges of the plurality of connection circuits 41 communicate with one another; a pressure sensor 47 for detecting pressure in the common detection circuit 43; and a fan fault determination sensor 51 for determining the presence or absence of a fault in a fan filter unit 37, based on a value detected by the pressure sensor 47. COPYRIGHT: (C)2010,JPO&INPIT
Bibliography:Application Number: JP20080206216