METHOD OF MANUFACTURING STATIC ELECTRICITY COUNTERMEASURE DEVICE

PROBLEM TO BE SOLVED: To provide a method of manufacturing a static electricity countermeasure device, which is superior in productivity and economical efficiency and further thins the film. SOLUTION: A gap type electrode mounting substrate 1 is formed with electrodes 21 and 22 made of a conductive...

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Main Authors HITOMI ATSUSHI, HIROBE YASUHIRO
Format Patent
LanguageEnglish
Published 04.02.2010
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Abstract PROBLEM TO BE SOLVED: To provide a method of manufacturing a static electricity countermeasure device, which is superior in productivity and economical efficiency and further thins the film. SOLUTION: A gap type electrode mounting substrate 1 is formed with electrodes 21 and 22 made of a conductive inorganic material and arranged oppositely on an insulating substrate 11 separately from each other (S11), and a thin film 30 containing an insulating inorganic material is formed between the electrodes 21 and 22 on the gap type electrode mounting substrate 1 (S12). Then, voltage is applied between the electrodes 21 and 22 (S13) to form a functional layer 31 (S21). COPYRIGHT: (C)2010,JPO&INPIT
AbstractList PROBLEM TO BE SOLVED: To provide a method of manufacturing a static electricity countermeasure device, which is superior in productivity and economical efficiency and further thins the film. SOLUTION: A gap type electrode mounting substrate 1 is formed with electrodes 21 and 22 made of a conductive inorganic material and arranged oppositely on an insulating substrate 11 separately from each other (S11), and a thin film 30 containing an insulating inorganic material is formed between the electrodes 21 and 22 on the gap type electrode mounting substrate 1 (S12). Then, voltage is applied between the electrodes 21 and 22 (S13) to form a functional layer 31 (S21). COPYRIGHT: (C)2010,JPO&INPIT
Author HITOMI ATSUSHI
HIROBE YASUHIRO
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Snippet PROBLEM TO BE SOLVED: To provide a method of manufacturing a static electricity countermeasure device, which is superior in productivity and economical...
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SourceType Open Access Repository
SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
NATURALLY-OCCURRING ELECTRICITY
RESISTORS
STATIC ELECTRICITY
Title METHOD OF MANUFACTURING STATIC ELECTRICITY COUNTERMEASURE DEVICE
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