METHOD OF MANUFACTURING STATIC ELECTRICITY COUNTERMEASURE DEVICE
PROBLEM TO BE SOLVED: To provide a method of manufacturing a static electricity countermeasure device, which is superior in productivity and economical efficiency and further thins the film. SOLUTION: A gap type electrode mounting substrate 1 is formed with electrodes 21 and 22 made of a conductive...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
04.02.2010
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a method of manufacturing a static electricity countermeasure device, which is superior in productivity and economical efficiency and further thins the film. SOLUTION: A gap type electrode mounting substrate 1 is formed with electrodes 21 and 22 made of a conductive inorganic material and arranged oppositely on an insulating substrate 11 separately from each other (S11), and a thin film 30 containing an insulating inorganic material is formed between the electrodes 21 and 22 on the gap type electrode mounting substrate 1 (S12). Then, voltage is applied between the electrodes 21 and 22 (S13) to form a functional layer 31 (S21). COPYRIGHT: (C)2010,JPO&INPIT |
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Bibliography: | Application Number: JP20080190937 |