CHEMICAL SUBSTANCE SENSING ELEMENT, CHEMICAL SUBSTANCE SENSING DEVICE AND METHOD FOR MANUFACTURING CHEMICAL SUBSTANCE SENSING ELEMENT

PROBLEM TO BE SOLVED: To provide a chemical substance sensing element excellent in the adhesiveness of a carbon nano-structure and a substrate, durability and detection sensitivity. SOLUTION: The chemical substance sensing element includes the substrate 130 having a thermal oxidation film 135 formed...

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Bibliographic Details
Main Authors TAKAO KATSUTOSHI, MURASHI YASUAKI, YAMANAKA MIKIHIRO, KUDO ATSUSHI, NISHIURA SHUJI
Format Patent
LanguageEnglish
Published 28.01.2010
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:PROBLEM TO BE SOLVED: To provide a chemical substance sensing element excellent in the adhesiveness of a carbon nano-structure and a substrate, durability and detection sensitivity. SOLUTION: The chemical substance sensing element includes the substrate 130 having a thermal oxidation film 135 formed on its surface, the buffer layer 136 formed on the thermal oxidation film 135 and comprising at least silicon nitride or silicon dioxide, the catalyst layer 137 formed on the surface of the buffer layer 136 and comprising metal catalyst fine particles 142 for accelerating the growth of the carbon nano-structure and the conductive layer 138 formed on the surface of the catalyst layer 137 and comprising the aggregate of the carbon nano-structure. The buffer layer 136 is formed by a sputtering method. COPYRIGHT: (C)2010,JPO&INPIT
Bibliography:Application Number: JP20080180485