RESISTANCE CHANGE TYPE GAS DETECTION ELEMENT AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a resistance change type gas detection element hardly producing the crack of a responsive layer or the release from an insulating substrate and the sensitive layer and having higher detection sensitivity. SOLUTION: The resistance change type gas detection element inc...

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Bibliographic Details
Main Authors SUZUKI KENGO, NAKAMURA SHUNICHI, SHIMAZAKI RYOTARO
Format Patent
LanguageEnglish
Published 07.01.2010
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:PROBLEM TO BE SOLVED: To provide a resistance change type gas detection element hardly producing the crack of a responsive layer or the release from an insulating substrate and the sensitive layer and having higher detection sensitivity. SOLUTION: The resistance change type gas detection element includes a pair of the electrodes 2a and 2b formed on the surface of the insulating substrate 1 and the sensitive part 3 arranged to fill the gap across a pair of the electrodes 2a and 2b. The sensitive part 3 includes the anchor part 3a locked with the recessed part 1a provided to the insulating substrate 1. COPYRIGHT: (C)2010,JPO&INPIT
Bibliography:Application Number: JP20080162173