PATTERN DISCRIMINATOR, PATTERN DISCRIMINATING METHOD AND INSPECTION DEVICE OF SAMPLE

• Main Author: HARABE NOBUYUKI
• Format: Patent
• Language: English
• Published: 17.12.2009
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MATERIALS THEREFOR; MEASURING; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

PROBLEM TO BE SOLVED: To discriminate a specific pattern from patterns of a sample using a transmitted image and a reflected image. SOLUTION: This pattern discriminator includes an optical image acquiring part for simultaneously acquiring the transmitted image and reflected image of the sample having the pattern and a specific pattern discriminating part for discriminating the specific pattern from the pattern shapes of the transmitted image and the reflected image by the discriminating condition of the specific pattern. This inspection device of the sample includes an optical image acquiring part for simultaneously acquiring the optical images of the transmitted image and reflected image of the sample having the pattern, the specific pattern discriminating part for discriminating the specific pattern from the pattern shapes of the transmitted image and the reflected image by the discriminating condition of the specific pattern, a specific inspection executing region setting part for setting the specific pattern to a specific inspection executing region, and a comparative determining part for inspecting the patterns of the optical images obtained by the optical image acquiring part in the specific inspection executing region. COPYRIGHT: (C)2010,JPO&INPIT