CHARGED PARTICLE BEAM DEVICE

PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of suitably suppressing vibration of a device body without forming concentration points of loads. SOLUTION: The charged particle beam device 1, in which a device body 10 including a sample room 4 equipped with a charged particle...

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Bibliographic Details
Main Authors ENOMOTO HIROHISA, SUZUKI WATARU, MARUYAMA NAOTOMO
Format Patent
LanguageEnglish
Published 10.12.2009
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of suitably suppressing vibration of a device body without forming concentration points of loads. SOLUTION: The charged particle beam device 1, in which a device body 10 including a sample room 4 equipped with a charged particle beam gun 2 is provided, is supported by a support stand 11 as a frame structure. A vibration isolator 6 installed on the support body 11 supports a support member 5a fitted to the device body 10 from under, while at least a part the device body 10 is positioned lower than a height where the vibration isolator 6 supports the supporting member 5a. COPYRIGHT: (C)2010,JPO&INPIT
Bibliography:Application Number: JP20080138443